Water-Jet Cavitation Shock Bulging as Novel Microforming Technique

Abstract With the continuous expansion of application range microelectromechanical systems, microdevice forming technology has achieved remarkable results. However, it is challenging to develop new microforming processes that are low cost, environmentally friendly, and highly flexible; high-energy shock wave in a cavitation bubble’s collapse process used as loading force. Herein, for microbulging water-jet proposed. A series experiments involving TA2 titanium foil performed on an experimental system. The feasibility investigated by characterizing shape formed part. Subsequently, effects main parameters bulging profile, depth, surface roughness, thickness distribution revealed. results show plastic deformation increases nonlinearly with incident pressure. When pressure 20 MPa, maximum exceeds 240 μm, thinning ratio changes within 10%. verified this phenomenon.